Simultaneous synthesis and integration of two-dimensional electronic components

Abstract

Two-dimensional (2D) materials such as transition metal chalcogenides can be used to create different components of electronic devices, including semiconducting channels and metallic electrodes and interconnects. However, devices are typically fabricated using a step-by-step process that can introduce defects and impurities, leading to a reduction in device performance. Here we show that 2D electronic components can be chemically synthesized and integrated simultaneously in a single step, creating 2D devices in which each component in the active layer is connected via covalent bonds instead of physical interfaces. The approach involves the phase-patterned growth of atomic layers, and, using 2D molybdenum ditelluride (MoTe2) as the active material, we show that it can be used to construct high-performance field-effect transistors (FETs) and arrays of logic devices. We also use the technique to construct FETs with ultrashort gate lengths, bilayered FETs with vertical interconnections and flexible devices. Electronic components made from two-dimensional MoTe2 can be chemically synthesized and integrated in a single step, creating devices in which each component in the active layer is connected via covalent bonds.

Cite this article

Zhang, Q., Wang, XF., Shen, SH. et al. Simultaneous synthesis and integration of two-dimensional electronic components. Nat Electron 2, 164–170 (2019). https://doi.org/10.1038/s41928-019-0233-2

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